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Microelectronics Research Center

ImageThe Microelectronics Research Center Facility (MRC) at The University of Texas at Austin is a research laboratory funded by the National Science Foundation through the National Nano-Technology Infrastructure Network (NNIN).

-Process  Equipment-

Ultra High Vacuum Chemical Vapor Deposition

The cold wall, ultra high vacuum chemical vapor deposition chamber is used mainly for nanowire growth. The available growth and doping precursors are SiH4, GeH4, PH3, and B2H6. A resistive graphite substrate heater encased in pyrolytic boron-nitride allows for growth temperatures up 700 °C. The tool can operate in dual mode: ultra-high vacuum, used for epi- growth, and low pressure (up to 10 Torr), used for nanowire growth.

Device Characterization Equipment

Low temperature, vertical magnetic field probe station (VFTTP)

The low temperature, vertical magnetic field probe station has a superconducting magnet, with fields of up to 2.5T, at sample temperatures between 1.8K and 300K. Electron transport in nanowire and 2D material devices is often measured in this probe station.

Low Temperature, horizontal magnetic field probe station (HFTTP)

The four probe arm, horizontal magnetic field probe station has a split coil superconducting magnet which allows magnetic fields of up 1T to be applied parallel to the sample. Spin injection devices are measured in this probe station.

Wire Bonder

Oxford Instruments Superconducting Magnet and Helium-3 Insert

Superconducting magnet and insert system allows for sample temperatures as low as 250 mK with a maximum vertical magnetic field of 14 T.

Last update 8/13/2012