Nanoelectronics Research Lab

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The Microelectronics Research Center Facility (MRC) at The University of Texas at Austin is a research laboratory funded by the National Science Foundation through the National Nano-Technology Infrastructure Network (NNIN).

-Process  Equipment-

The cold wall, ultra high vacuum chemical vapor deposition chamber is used mainly for nanowire growth. The available growth and doping precursors are SiH₄, GeH₄, PH₃, and B₂H₆. A resistive graphite substrate heater encased in pyrolytic boron-nitride allows for growth temperatures up to 700 °C. The tool can operate in dual mode: ultra-high vacuum, used for epi- growth, and low pressure (up to 10 Torr), used for nanowire growth.

The ultra high vacuum (UHV) high temperature chemical vapor deposition has been designed and built in-house. It has a cold wall chamber with a base pressure of 1e-9 Torr, a resistive graphite substrate heater encased in pyrolytic boron-nitride for growth temperatures up 1000 °C. It is used for graphene-related growth, and UHV anneals of van der Waals heterostructures.

Low temperature, vertical magnetic field probe station (VFTTP)

The low temperature, vertical magnetic field probe station has a superconducting magnet, with fields of up to 2.5T, at sample temperatures between 1.8K and 300K. Electron transport in nanowire and 2D material devices is often measured in this probe station.

Low Temperature, horizontal magnetic field probe station (HFTTP)

The four probe arm, horizontal magnetic field probe station has a split coil superconducting magnet which allows magnetic fields of up 1T to be applied parallel to the sample. Spin injection devices are measured in this probe station.

Wire Bonder

AFM

Oxford Instruments Superconducting Magnet

Dewar and superconducting magnet with fields up to 16 T.

Variable Temperature Insert

Variable temperature insert allows convenient loading/unloading of samples, and operation temperatures from 1.4 K to room temperature.

Pumped He3 Refrigerator Insert

Pumped He3 refrigerator insert allows operation temperature down to 250 mK.

Glove box and motorized transfer station

The nitrogen-purged glove box allows exfoliation, storage and in-situ dry transfer of volatile 2D materials, e.g. MoTe₂, InSe, NbSe₂, etc. The motorized sample stage in the glove box is remotely controlled by a computer and capable of accurately controlling the temperature, movement and rotation. The stage coupled with a high-resolution optical microscope imaging enables fabrication of exquisite 2D Van der Waals heterostructure.